Design, Fabrication, and Control of a High-aspect Ratio Microactuator for Vibration Suppression in a Hard Disk Drive

Positioning the read-write head in a hard disk drive over data bits at densities now approaching 1 terabit per square inch will novel servo configurations and controllers. This paper presents a MEMS microactuator for installation in a dual-stage servo system for a hard disk drive and controller designs that utilize the microactuator to suppress vibration of the servo arm. The microactuator uses high-aspect ratio etching and deep trench isolation to generate high force densities and good mechanical robustness. The microactuator is installed in a hard disk drive and will be used to evaluate PQ and mixed H2/H∞ controllers designed to suppress airflow-induced vibration in disk drives, currently presented with simulation results.